Thoms, S. (2001) T-gate fabrication using a ZEP520A/UVIII bilayer. Microelectronic Engineering, 57-58, pp. 939-943.
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen |
| Authors: | Thoms, S. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
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