Lister, K., Casey, B., Dobson, P., Thoms, S., Macintyre, D., Wilkinson, C. and Weaver, J. (2004) Pattern transfer of a 23 nm-period grating and sub-15 nm dots into CVD diamond. Microelectronic Engineering, 73-4, pp. 319-322. (doi: 10.1016/j.mee.2004.02.060)
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| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas and Weaver, Professor Jonathan and Dobson, Dr Phil |
| Authors: | Lister, K., Casey, B., Dobson, P., Thoms, S., Macintyre, D., Wilkinson, C., and Weaver, J. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | Microelectronic Engineering |
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