Li, X. , Floros, K., Ternent, G., Al-Khalidi, A. , Wasige, E. and Thayne, I. G. (2015) Effect of SiH4 Inductively Coupled Plasma Surface Treatment On Low Temperature and Low Resistance Ohmic Contact for AlGaN/GaN-Based Power Device. In: 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials / 8th International Conference on Plasma-Nano Technology & Science (ISPlasma2015 / IC-PLANTS2015), Nagoya, Japan, 26-31 March 2015,
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Abstract
No abstract available.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Wasige, Professor Edward and Li, Dr Xu and Thayne, Prof Iain and Ternent, Dr Gary and Al-Khalidi, Dr Abdullah |
Authors: | Li, X., Floros, K., Ternent, G., Al-Khalidi, A., Wasige, E., and Thayne, I. G. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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