Zain, A. R. M., Majlis, B. Y. and De La Rue, R. M. (2015) Reproducibility and Free Spectral Range (FSR) Control of a High Quality Factor-1D Photonic Crystal (PhC) Extended Cavity. In: 2015 IEEE Regional Symposium on Micro and Nano Electronics (RSM), Kuala Terengganu, Malaysia, 19-21 Aug 2015, pp. 290-292. ISBN 9781479985500 (doi: 10.1109/RSM.2015.7355023)
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Abstract
In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.
Item Type: | Conference Proceedings |
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Additional Information: | This work was supported in part by the Ministry of Higher Education Malaysia (MoHE ) through HiCOE Grant AKU-95. |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | De La Rue, Professor Richard |
Authors: | Zain, A. R. M., Majlis, B. Y., and De La Rue, R. M. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
ISBN: | 9781479985500 |
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