Advanced nanoanalysis of high-k dielectric stacks

MacKenzie, M., Craven, A., McComb, D. and De Gendt, S. (2006) Advanced nanoanalysis of high-k dielectric stacks. Journal of the Electrochemical Society, 153, F215-F218. (doi: 10.1149/1.2218758)

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Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:McComb, Dr David
Authors: MacKenzie, M., Craven, A., McComb, D., and De Gendt, S.
College/School:College of Science and Engineering > School of Chemistry
Journal Name:Journal of the Electrochemical Society

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