Greer, A. I.M. , Della-Rosa, B., Khokhar, A. Z. and Gadegaard, N. (2016) Step-and-repeat nanoimprint-, photo- and laser-lithography from one customised CNC machine. Nanoscale Research Letters, 11, 129. (doi: 10.1186/s11671-016-1341-9) (PMID:26956598) (PMCID:PMC4783314)
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Abstract
The conversion of a computer numerical control machine into a nanoimprint step-and-repeat tool with additional laser- and photolithography capacity is documented here. All three processes, each demonstrated on a variety of photoresists, are performed successfully and analysed so as to enable the reader to relate their known lithography process(es) to the findings. Using the converted tool, 1 cm2 of nanopattern may be exposed in 6 s, over 3300 times faster than the electron beam equivalent. Nanoimprint tools are commercially available, but these can cost around 1000 times more than this customised computer numerical control (CNC) machine. The converted equipment facilitates rapid production and large area micro- and nanoscale research on small grants, ultimately enabling faster and more diverse growth in this field of science. In comparison to commercial tools, this converted CNC also boasts capacity to handle larger substrates, temperature control and active force control, up to ten times more curing dose and compactness. Actual devices are fabricated using the machine including an expanded nanotopographic array and microfluidic PDMS Y-channel mixers.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Greer, Dr Andrew and Gadegaard, Professor Nikolaj |
| Authors: | Greer, A. I.M., Della-Rosa, B., Khokhar, A. Z., and Gadegaard, N. |
| College/School: | College of Science and Engineering > School of Engineering > Biomedical Engineering |
| Journal Name: | Nanoscale Research Letters |
| Publisher: | Springer |
| ISSN: | 1931-7573 |
| ISSN (Online): | 1556-276X |
| Copyright Holders: | Copyright © 2016 Greer et al. |
| First Published: | First published in Nanoscale Research Letters 11:129 |
| Publisher Policy: | Reproduced under a Creative Commons License |
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