Escorcia Carranza, I. , Grant, J. P. , Gough, J. and Cumming, D. (2017) Terahertz metamaterial absorbers implemented in CMOS technology for imaging applications: scaling to large format focal plane arrays. IEEE Journal of Selected Topics in Quantum Electronics, 23(4), 4700508. (doi: 10.1109/JSTQE.2016.2630307)
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Abstract
We present the design and fabrication of terahertz (THz) metamaterial (MM) absorbers and their monolithic integration into a commercial CMOS technology along with its respective readout electronics to produce a low-cost, uncooled and high resolution THz camera. We first describe the work done on single band and broadband MM absorbers on custom substrates then progress with a description of the integration of such resonators into a six metal layer 180 nm CMOS process and its coupling with two types of microbolometer sensors: vanadium oxide (VOx) and silicon (Si) pn diode. Additionally, we demonstrate the integration of the THz sensors with readout electronics to form a monolithic THz focal plane array (FPA). Reflection images of a metallic object hidden in a manila envelope are recorded using both the VOx and Si pn diode detectors, demonstrating the suitability of the technology for stand-off detection of concealed objects. Lastly, we present the current work towards scaling this technology into a 64 x 64 FPA.
| Item Type: | Articles |
|---|---|
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Cumming, Professor David and Gough, Mr John and Grant, Dr James and Escorcia Carranza, Dr Ivonne |
| Authors: | Escorcia Carranza, I., Grant, J. P., Gough, J., and Cumming, D. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Journal Name: | IEEE Journal of Selected Topics in Quantum Electronics |
| Publisher: | Institute of Electrical and Electronics Engineers |
| ISSN: | 1077-260X |
| ISSN (Online): | 1558-4542 |
| Published Online: | 18 November 2016 |
| Copyright Holders: | Copyright © 2016 The Authors |
| First Published: | First published in IEEE Journal of Selected Topics in Quantum Electronics 23(4): 4700508 |
| Publisher Policy: | Reproduced under a Creative Commons License |
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