Scribe–cleave–passivate (SCP) slim edge technology for silicon sensors

Fadeyev, V. et al. (2013) Scribe–cleave–passivate (SCP) slim edge technology for silicon sensors. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment, 731, pp. 260-265. (doi: 10.1016/j.nima.2013.03.046)

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Abstract

We are pursuing scribe–cleave–passivate (SCP) technology of making “slim edge” sensors. Such sensors have only a minimal amount of inactive peripheral region, which benefits construction of large-area tracker and imaging systems. Key application steps of this method are surface scribing, cleaving, and passivation of the resulting sidewall. We are working on developing both the technology and physical understanding of the processed devices performance. In this paper we begin by reviewing the manufacturing options of SCP technology. Then we show new results regarding the technology automation and device physics performance. The latter includes charge collection efficiency near the edge and radiation hardness study. We also report on the status of devices processed at the request of the RD50 collaborators.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Maneuski, Dr Dima and Blue, Dr Andrew and Bates, Dr Richard and Eklund, Prof Lars and Stewart, Dr Graeme
Authors: Fadeyev, V., Sadrozinski, H.F.-W., Ely, S., Wright, J.G., Christophersen, M., Phlips, B.F., Pellegrini, G., Grinstein, S., Dalla Betta, G.-F., Boscardin, M., Klingenberg, R., Wittig, T., Macchiolo, A., Weigell, P., Creanza, D., Bates, R., Blue, A., Eklund, L., Maneuski, D., Stewart, G., Casse, G., Gorelov, I., Hoeferkamp, M., Metcalfe, J., Seidel, S., and Kramberger, G.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
Publisher:Elsevier B.V.
ISSN:0168-9002
ISSN (Online):1872-9576

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