POSFET tactile sensing arrays using CMOS technology

Dahiya, R. S. , Adami, A., Collini, C. and Lorenzelli, L. (2012) POSFET tactile sensing arrays using CMOS technology. Procedia Engineering, 47, pp. 894-897. (doi:10.1016/j.proeng.2012.09.291)

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This work presents fabrication and evaluation of novel POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) devices based tactile sensing chip. In the newer version presented here, the tactile sensing chip has been fabricated using CMOS (Complementary Metal Oxide Semiconductor) technology. The chip consists of 4 x 4 POSFET touch sensing devices (or taxels) and both, the individual taxels and the array are designed to match spatio–temporal performance of the human fingertips. To detect contact events, the taxels utilize the contact forces induced change in the polarization level of piezoelectric polymer (and hence change in the induced channel current of MOS). The POSFET device on the chip have linear response in the tested dynamic contact forces range of 0.01–3 N and the sensitivity (without amplification) is 102.4 mV/N.

Item Type:Articles
Additional Information:26th European Conference on Solid-State Transducers, EUROSENSOR 2012
Glasgow Author(s) Enlighten ID:Dahiya, Professor Ravinder
Authors: Dahiya, R. S., Adami, A., Collini, C., and Lorenzelli, L.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Procedia Engineering
Publisher:Elsevier Ltd.
ISSN (Online):1877-7058
Copyright Holders:Copyright © 2012 The Authors
First Published:First published in Procedia Engineering 47:894-897
Publisher Policy:Reproduced under a Creative Commons License

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