Fabry-Pérot resonator with nanostructures for multispectral visible filtering

Walls, K., Chen, Q., Cumming, D. R.S. and Drysdale, T. D. (2012) Fabry-Pérot resonator with nanostructures for multispectral visible filtering. In: 2012 12th IEEE Conference on Nanotechnology (IEEE-NANO), Birmingham, UK, 20-23 Aug 2012, pp. 1-5. (doi: 10.1109/NANO.2012.6321940)

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Publisher's URL: http://dx.doi.org/10.1109/NANO.2012.6321940


We design, fabricate and characterise examples of a narrowband filter that is intended for post-processing onto complementary-metal oxide-semiconductor (CMOS) imaging sensors to make compact multispectral imaging instruments. The filter is based on a Fabry-Pérot cavity, with the centre frequency of the filter controlled by patterning subwavelength holes into the structure using electron beam lithography and dry etching. We show that even though the top mirror layer has holes, acceptable performance is obtained with full width half maximums in the range 46-60 nm and a full visible band free spectral range. We present simulations of a set of 16 filters spanning the visible range (400-750nm) requiring only 5 separate lithography cycles.

Item Type:Conference Proceedings
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Walls, Miss Kirsty and Drysdale, Dr Timothy and Chen, Dr Qin
Authors: Walls, K., Chen, Q., Cumming, D. R.S., and Drysdale, T. D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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