Metamaterial fishnet structures and small (70 nm) split ring resonators formed by nanoimprint lithography

Johnson, N. P., Sharp, G. J., Yuce, M., Xiaolong, H., Sinworapun, M. and Khokar, A. Z. (2013) Metamaterial fishnet structures and small (70 nm) split ring resonators formed by nanoimprint lithography. In: 15th International Conference on Transparent Optical Networks (ICTON 2013), Cartagena, Spain, 23-27 Jun 2013, pp. 1-3. (doi: 10.1109/ICTON.2013.6603016)

Abstract

We report on the fabrication and optical characterisation of fishnet structures of various dimensions on a polymer layer with metal-dielectric-metal compressed rectangular pillars. The metamaterial structures are fabricated using nanoimprint lithography, allowing large areas to be patterned quickly with good reproducibility through multiple use of a nanoimprint stamp. We also report on the use of NIL to produce 70 nm wide single spilt ring resonators on silicon substrates pushing the magnetic resonance to 830 nm.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Johnson, Dr Nigel and Khokhar, Dr Ali and Sharp, Mr Graham
• Authors: Johnson, N. P., Sharp, G. J., Yuce, M., Xiaolong, H., Sinworapun, M., and Khokar, A. Z.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering