Cao, M., Li, X. , Ferguson, S., Thoms, S. , Macintyre, D. and Thayne, I. (2013) A simple silicon compatible 40 nm electroplated Copper T‐gate process. In: MNE2013: 39th International Conference on Micro and Nano Engineering, London, UK, 16-19 Sept. 2013,
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Publisher's URL: http://www.mne2013.org/
Abstract
No abstract available.
Item Type: | Conference Proceedings |
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Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Thayne, Prof Iain and Thoms, Dr Stephen and Ferguson, Mrs Susan and Li, Dr Xu and Macintyre, Dr Douglas |
Authors: | Cao, M., Li, X., Ferguson, S., Thoms, S., Macintyre, D., and Thayne, I. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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