Influence of methanol addition on diamond films deposition with hot cathode DC-PCVD method

Jiang, Z.-G., Jing, Z.-S., Bai, Y.-Z., Cao, P.-J., Zhang, L., Yang, G.-L., Li, J.-J. and Lu, X.-Y. (2002) Influence of methanol addition on diamond films deposition with hot cathode DC-PCVD method. Chemical Journal of Chinese Universities, 23(9), pp. 1648-1650.

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Abstract

Diamond films were deposited with hot cathode DC-PCVDmethod in this paper. The methanol addition influences on discharge state and diamond film growth characteristics were studied. The research results show that a proper amount of methanol addition is beneficial to the stability of glow discharge. It can keep the cathode surface clean and improve the film quality. The growth characteristics of diamond films are analyzed by means of SEMand Raman spectroscopy.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Yang, Dr Guangliang
Authors: Jiang, Z.-G., Jing, Z.-S., Bai, Y.-Z., Cao, P.-J., Zhang, L., Yang, G.-L., Li, J.-J., and Lu, X.-Y.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Chemical Journal of Chinese Universities
Publisher:Higher Education Press
ISSN:0251-0790

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