Thermal analysis of submicron nanocrystalline diamond films

Rossi, S., Alomari, M., Zhang, Y., Bychikhin, S., Pogany, D., Weaver, J.M.R. and Kohn, E. (2013) Thermal analysis of submicron nanocrystalline diamond films. Diamond and Related Materials, 40, pp. 69-74. (doi: 10.1016/j.diamond.2013.10.004)

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Abstract

The thermal properties of sub-μm nanocrystalline diamond films in the range of 0.37–1.1 μm grown by hot filament CVD, initiated by bias enhanced nucleation on a nm-thin Si-nucleation layer on various substrates, have been characterized by scanning thermal microscopy. After coalescence, the films have been outgrown with a columnar grain structure. The results indicate that even in the sub-μm range, the average thermal conductivity of these NCD films approaches 400 W m− 1 K− 1. By patterning the films into membranes and step-like mesas, the lateral component and the vertical component of the thermal conductivity, k<sub>lateral</sub> and k<sub>vertical</sub>, have been isolated showing an anisotropy between vertical conduction along the columns, with k<sub>vertical</sub> ≈ 1000 W m− 1 K− 1, and a weaker lateral conduction across the columns, with k<sub>lateral</sub> ≈ 300 W m− 1 K− 1.

Item Type:Articles
Additional Information:NOTICE: this is the author’s version of a work that was accepted for publication in Diamond and Related Materials. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Diamond and Related Materials 40:69-74 2013 DOI: 10.1016/j.diamond.2013.10.004
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Weaver, Professor Jonathan and Zhang, Dr Yuan
Authors: Rossi, S., Alomari, M., Zhang, Y., Bychikhin, S., Pogany, D., Weaver, J.M.R., and Kohn, E.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Diamond and Related Materials
Publisher:Elsevier B.V.
ISSN:0925-9635
Copyright Holders:Copyright © 2013 Elsevier B.V.
First Published:First published in Diamond and Related Materials 40:69-74
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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