Fabrication of high quality plan-view TEM specimens using the focused ion beam

O'Shea, K.J., McGrouther, D. , Ferguson, C.A., Jungbauer, M., Hühn, S., Moshnyaga, V. and MacLaren, D.A. (2014) Fabrication of high quality plan-view TEM specimens using the focused ion beam. Micron, 66, pp. 9-15. (doi:10.1016/j.micron.2014.04.011)

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Publisher's URL: http://dx.doi.org/10.1016/j.micron.2014.04.011

Abstract

We describe a technique using a focused ion beam instrument to fabricate high quality plan-view specimens for transmission electron microscopy studies. The technique is simple, site-specific and is capable of fabricating multiple large, >100 μm2 electron transparent windows within epitaxially-grown thin films. A film of La0.67Sr0.33MnO3 is used to demonstrate the technique and its structural and functional properties are surveyed by high resolution imaging, electron spectroscopy, atomic force microscopy and Lorentz electron microscopy. The window is demonstrated to have good thickness uniformity and a low defect density that does not impair the film’s Curie temperature. The technique will enable the study of in–plane structural and functional properties of a variety of epitaxial thin film systems.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:McGrouther, Dr Damien and O'Shea, Miss Kerry and MacLaren, Dr Donald
Authors: O'Shea, K.J., McGrouther, D., Ferguson, C.A., Jungbauer, M., Hühn, S., Moshnyaga, V., and MacLaren, D.A.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Micron
Publisher:Elsevier
ISSN:0968-4328
ISSN (Online):1878-4291
Copyright Holders:Copyright © 2014 Elsevier Ltd.
First Published:First published in Micron 66:9-15
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
530721Integrating advanced nanomaterials into transformative technologiesDonald MaclarenEngineering & Physical Sciences Research Council (EPSRC)EP/I00419X/1P&A - PHYSICS & ASTRONOMY