Zhou, H., Sim, C., Glidle, A., Hodson, C., Kinsey, R. and Wilkinson, C.D.W. (2005) Plasma deposition of thin films. In: D'Agostino, R. (ed.) Plasma Processes and Polymers. WILEY-VCH: Weinheim, pp. 77-86. ISBN 9783527404872
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| Item Type: | Book Sections |
|---|---|
| Status: | Published |
| Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping |
| Authors: | Zhou, H., Sim, C., Glidle, A., Hodson, C., Kinsey, R., and Wilkinson, C.D.W. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Publisher: | WILEY-VCH |
| ISBN: | 9783527404872 |
| Related URLs: |
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