Optimisation of sidewalls in III-V FinFETs

Peralagu, U. , Ignatova, O. , Li, X. , Steer, M., Povey, I.M., Hurley, P.K. and Thayne, I.G. (2013) Optimisation of sidewalls in III-V FinFETs. In: UK Semiconductors 2013, Sheffield, UK, 3 - 4 Jul 2013,

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Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Steer, Dr Matthew and Li, Dr Xu and Thayne, Professor Iain and Ignatova, Dr Olesya and Peralagu, Mr Uthayasankaran
Authors: Peralagu, U., Ignatova, O., Li, X., Steer, M., Povey, I.M., Hurley, P.K., and Thayne, I.G.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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