Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification

Greer, A. I.M. , Seunarine, K., Khokhar, A. Z., MacLaren, I. , Brydone, A. S., Moran, D. A.J. and Gadegaard, N. (2013) Increased efficiency of direct nanoimprinting on planar and curved bulk titanium through surface modification. Microelectronic Engineering, 112, pp. 67-73. (doi: 10.1016/j.mee.2013.05.016)

[img]
Preview
Text
81034.pdf - Published Version
Available under License Creative Commons Attribution.

2MB

Abstract

In this work the direct transfer of nanopatterns into titanium is demonstrated. The nanofeatures are imprinted at room temperature using diamond stamps in a single step. We also show that the imprint properties of the titanium surface can be altered by anodisation yielding a significant reduction in the required imprint force for pattern transfer. The anodisation process is also utilised for curved titanium surfaces where a reduced imprint force is preferable to avoid sample deformation and damage. We finally demonstrate that our process can be applied directly to titanium rods.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Seunarine, Dr Krishna and Khokhar, Dr Ali and MacLaren, Dr Ian and Moran, Dr David and Greer, Mr Andrew and Gadegaard, Professor Nikolaj
Authors: Greer, A. I.M., Seunarine, K., Khokhar, A. Z., MacLaren, I., Brydone, A. S., Moran, D. A.J., and Gadegaard, N.
College/School:College of Science and Engineering > School of Engineering > Biomedical Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Journal Name:Microelectronic Engineering
Publisher:Elsevier
ISSN:0167-9317
ISSN (Online):1873-5568
Copyright Holders:Copyright © 2013 The Authors
First Published:First published in Microelectronic Engineering 112:67-73
Publisher Policy:Reproduced under a Creative Commons License

University Staff: Request a correction | Enlighten Editors: Update this record