Surface Preparation of 1-3 Piezocomposite Material for Microfabrication of High Frequency Transducer Arrays

Bernassau, A.L., McKay, S., Hutson, D., Demore, C.E.M., Garcia-Gancedo, L., Button, T.W., McAneny, J.J. and Cochran, S. (2007) Surface Preparation of 1-3 Piezocomposite Material for Microfabrication of High Frequency Transducer Arrays. In: 2007 IEEE International Ultrasonics Symposium (IUS), New York, NY, USA, 28-31 Oct 2007, pp. 96-99. ISBN 9781424413836 (doi:10.1109/ULTSYM.2007.37)

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Abstract

A key issue in the development of ultrasound imaging arrays to operate at frequencies above 30 MHz is the need for photolithographic patterning of array electrodes. To achieve this directly on a 1-3 piezocomposite requires planar, parallel and smooth surfaces. This paper reports an investigation of the surface finishing of 1-3 piezocomposite material by mechanical lapping and/polishing that has demonstrated that excellent surface flatness can be obtained. Subsequently, high frequency array elements have been fabricated on these surfaces using a low temperature lift-off photolithography process. A 50 MHz linear array with 30 mum element pitch has been patterned on the lapped and polished surface of a low frequency 1-3 piezocomposite. Good electrode edge definition and electrical contact to the composite were obtained. Additionally, patterning has been demonstrated on a fine-scale composite, itself suitable for operation above 30 MHz.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Bernassau, Dr Anne and Cochran, Professor Sandy and Demore, Dr Christine
Authors: Bernassau, A.L., McKay, S., Hutson, D., Demore, C.E.M., Garcia-Gancedo, L., Button, T.W., McAneny, J.J., and Cochran, S.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Engineering > Systems Power and Energy
ISSN:1051-0117
ISBN:9781424413836
Published Online:26 December 2007

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