Surface plasmon resonance for digital imaging

Cumming, D.R.S. , Chen, Q., Walls, K., Drysdale, T.D., Collins, S., Das, D. and Chitnis, D. (2012) Surface plasmon resonance for digital imaging. In: 12th IEEE Conference on Nanotechnology, Birmingham, UK, 20-23 Aug 2012, pp. 1-2. (doi: 10.1109/NANO.2012.6321896)

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We present the design, implementation and test of a CMOS image sensor filter technology based on the exploitation of surface plasmon resonance. We demonstrate precise design and control of the spectral response of filters made in a single aluminium film. The film is patterned using electron beam lithography and reactive ion etching. Unlike conventional filter technology for CMOS, all the desired colour responses can be obtained in a single lithographic sequence. We show that the photocurrent from the sensors has the required spectral response after fabrication.

Item Type:Conference Proceedings
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Drysdale, Dr Timothy and Chen, Dr Qin
Authors: Cumming, D.R.S., Chen, Q., Walls, K., Drysdale, T.D., Collins, S., Das, D., and Chitnis, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
387921Extreme sensitivity by engineering plasmon resonance sensorsDavid CummingEngineering & Physical Sciences Research Council (EPSRC)EP/C509927/1ENG - ENGINEERING ELECTRONICS & NANO ENG