Narrowband multispectral filter set for visible band

Walls, K., Chen, Q., Grant, J. , Collins, S., Cumming, D. and Drysdale, T. (2012) Narrowband multispectral filter set for visible band. Optics Express, 20(20), p. 21917. (doi:10.1364/OE.20.021917)

Walls, K., Chen, Q., Grant, J. , Collins, S., Cumming, D. and Drysdale, T. (2012) Narrowband multispectral filter set for visible band. Optics Express, 20(20), p. 21917. (doi:10.1364/OE.20.021917)

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Publisher's URL: http://dx.doi.org/10.1364/OE.20.021917

Abstract

We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400–750nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22–46nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Cumming, Professor David and Drysdale, Dr Timothy and Chen, Dr Qin and Grant, Dr James
Authors: Walls, K., Chen, Q., Grant, J., Collins, S., Cumming, D., and Drysdale, T.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Express
ISSN:1094-4087
Published Online:10 September 2012

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
479851Digital imaging enhanced by plasmon resonance elementsDavid CummingEngineering & Physical Sciences Research Council (EPSRC)EP/G008329/1ENG - ENGINEERING ELECTRONICS & NANO ENG