Large microchannel array fabrication and results for DNA sequencing

Swierkowski, S.P. et al. (1999) Large microchannel array fabrication and results for DNA sequencing. In: Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II, 100, San Jose, CA, 23 January 1999, pp. 100-110. (doi:10.1117/12.350050)

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We have developed a process for the production of microchannel arrays on bonded glass substrates up to 14 X 58 cm, for DNA sequencing. Arrays of 96 and 384 microchannels, each 46 cm long have been built. This technology offers significant advantages over discrete capillaries or conventional slab-gel approaches. High throughput DNA sequencing with over 550 base pairs resolution has been achieved. With custom fabrication apparatus, microchannels are etched in a borosilicate substrate, and then fusion bonded to a top substrate 1.1 mm thick that has access holes formed in it. SEM examination shows a typical microchannel to be 40 X 180 micrometers by 46 cm long; the etch is approximately isotropic, leaving a key undercut, for forming a rounded channel. The surface roughness at the bottom of the 40 micrometer deep channel has been profilometer measured to be as low as 20 nm; the roughness at the top surface was 2 nm. Etch uniformity of about 5% has been obtained using a 22% vol. HF/78% Acetic acid solution. The simple lithography, etching, and bonding of these substrate enables efficient production of these arrays and extremely precise replication from master masks and precision machining with a mandrel

Item Type:Conference Proceedings
Additional Information:Proc. SPIE 3606
Glasgow Author(s) Enlighten ID:Brewer, Dr Laurence
Authors: Swierkowski, S.P., Balch, J.W., Brewer, L.R., Copeland, A.C., Davidson, J.C., Fitch, J.C., Kimbrough, J.R., Madabhushi, R.S., Pastrone, R.L., Richardson, P.M., Tarte, L.A., and Vainer, M.
College/School:College of Science and Engineering > School of Physics and Astronomy

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