Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing

A. Rahman, M.G., Velha, P., De La Rue, R.M. and Johnson, N.P. (2012) Silicon-on-insulator (SOI) nanobeam optical cavities for refractive index based sensing. In: Optical Sensing and Detection II, Brussels, Belgium, 16 Apr 2012, 84391Q-84391Q. (doi:10.1117/12.922554)

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Publisher's URL: http://dx.doi.org/10.1117/12.922554

Abstract

We present the design modelling and fabrication of Silicon-On-Insulator (SOI) nanobeam cavities that are immersed in a microfluidic system for refractive index sensing. The device has sensitivity value of greater than 200 nm/RIU with a Q-factor more than 20 000 in water. It was fabricated on a SOI platform and working at telecom wavelengths. The use of the SOI platform also offers further possibilities of integration with CMOS technologies.

Item Type:Conference Proceedings
Additional Information:ISBN: 9780819491312
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Johnson, Dr Nigel and De La Rue, Professor Richard and Velha, Mr Philippe
Authors: A. Rahman, M.G., Velha, P., De La Rue, R.M., and Johnson, N.P.
College/School:College of Science and Engineering > School of Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
ISSN:0277786X

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