Compact LED based nanoimprinter for UV-NIL

Khokhar, A.Z., Gaston, A., Obieta, I. and Gadegaard, N. (2011) Compact LED based nanoimprinter for UV-NIL. Microelectronic Engineering, 88(11), pp. 3347-3352. (doi:10.1016/j.mee.2011.06.023)

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Publisher's URL: http://dx.doi.org/10.1016/j.mee.2011.06.023


Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Khokhar, Dr Ali and Gadegaard, Professor Nikolaj
Authors: Khokhar, A.Z., Gaston, A., Obieta, I., and Gadegaard, N.
College/School:College of Science and Engineering > School of Engineering > Biomedical Engineering
College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Microelectronic Engineering
ISSN:0167-9317

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