Ternent, G., Ferguson, S., Borsosfoldi, Z., Elgaid, K., Lohdi, T., Edgar, D., Wilkinson, C.D.W., and Thayne, I.G. (1999) Coplanar waveguide transmission lines and high Q inductors on CMOS grade silicon using photoresist and polyimide. Electronics Letters, 35(22), pp. 1957-1958. (doi:10.1049/el:19991298)
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Gold coplanar waveguide (CPW) transmission lines with losses of <0.5 dB/mm at 60 GHz have been produced on CMOS grade silicon substrates using a 15 μm thick layer of either photoresist or polyimide. This process, together with an electroplated interconnect technique, has been used to produce spiral inductors on a 2 Ω/cm n-Si substrate with a Q of 15 and L of 1.2 nH at 6 GHz.
|Glasgow Author(s) Enlighten ID:||Thayne, Professor Iain and Elgaid, Dr Khaled and Ternent, Dr Gary and Wilkinson, Professor Christopher|
|Authors:||Ternent, G., Ferguson, S., Borsosfoldi, Z., Elgaid, K., Lohdi, T., Edgar, D., Wilkinson, C.D.W., and Thayne, I.G.|
|College/School:||College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering|
|Journal Name:||Electronics Letters|
|Publisher:||The Institution of Engineering & Technology|