First double-sided 3-D detectors fabricated at CNM-IMB

Pellegrini, G., Lozano, M., Ullán, M., Bates, R., Fleta, C. and Pennicard, D. (2008) First double-sided 3-D detectors fabricated at CNM-IMB. Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment, 592(1-2), pp. 38-43. (doi: 10.1016/j.nima.2008.03.119)

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Publisher's URL: http://dx.doi.org/10.1016/j.nima.2008.03.119

Abstract

The first results on double-sidedthree-dimensional (3-D) silicon radiation detectors are reported in this paper. The detector consists of a three-dimensional array of electrodes that penetrate into the detector bulk with the anode and cathode electrodes etched from opposite sides of the substrate. The geometry of the detector is such that a central anode is surrounded by four cathode contacts. The maximum drift and depletion distances are equal to the electrode spacing rather than detector thickness. This structure is similar to a conventional 3-Ddetector, but has a simpler fabrication process. The technological and the electrical simulations together with the fabrication steps of this new detector configuration are reported in this paper. The firstdetectorsfabricated at CNM are reported here and have been characterized by electrical measurements.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Bates, Dr Richard
Authors: Pellegrini, G., Lozano, M., Ullán, M., Bates, R., Fleta, C., and Pennicard, D.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors, and Associated Equipment
ISSN:0168-9002
ISSN (Online):1872-9576
Published Online:06 April 2008

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
4078043D Detectors for Synchrotron ApplicationsChristopher ParkesEngineering & Physical Sciences Research Council (EPSRC)EP/D014573/1Physics and Astronomy