Low-temperature strength tests and SEM imaging of hydroxide catalysis bonds in silicon

Beveridge, N. et al. (2011) Low-temperature strength tests and SEM imaging of hydroxide catalysis bonds in silicon. Classical and Quantum Gravity, 28(8), 085014. (doi: 10.1088/0264-9381/28/8/085014)

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Publisher's URL: http://dx.doi.org/10.1088/0264-9381/28/8/085014

Abstract

Silicon is under consideration as a substrate material for the test masses and suspension elements of gravitational wave detectors of improved sensitivity. Hydroxide catalysis bonding is a candidate technique for jointing silicon elements with the potential for both high strength and low mechanical loss. A future detector with quasi-monolithic silicon final stages may operate at cryogenic temperatures. Here we present the first studies of the strength of silicon–silicon bonds at 77 K (liquid nitrogen temperature) and show characteristic strengths of ~44 MPa. When comparing cryogenic to room temperature results, no significant difference is apparent in the strength. We also show that a minimum thickness of oxide layer of 50 nm is desirable to achieve reliably strong bonds. Bonds averaging 47 nm in thickness are achieved for oxide thicknesses greater than 50 nm.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Scott, Dr Jamie and Rowan, Professor Sheila and Beveridge, Miss Nicola and van Veggel, Dr Marielle and Nawrodt, Dr Ronny and Hough, Professor James and Reid, Professor Stuart and Cunningham, Dr Liam and Montgomery, Dr Rachel and Hendry, Professor Martin and Murray, Dr Peter
Authors: Beveridge, N., van Veggel, A.A., Hendry, M., Murray, P., Montgomery, R., Jesse, E., Scott, J., Bezensek, R.B., Cunningham, L., Hough, J., Nawrodt, R., Reid, S., and Rowan, S.
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Classical and Quantum Gravity
ISSN:0264-9381
ISSN (Online):1361-6382

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
451221Development of key adaptive mirror technologies for the European Extremely Large Telescope (ELT)Calum TorrieScience & Technologies Facilities Council (STFC)ST/F003455/1Physics and Astronomy