Optical characterisation of an HSQ lithography process

Thoms, S. , Gnan, M., Macintyre, D., Samarelli, A., Sorel, M., Strain, M. and De La Rue, R. (2008) Optical characterisation of an HSQ lithography process. In: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), Portland, USA, 27-30 May 2008,

Thoms, S. , Gnan, M., Macintyre, D., Samarelli, A., Sorel, M., Strain, M. and De La Rue, R. (2008) Optical characterisation of an HSQ lithography process. In: International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN), Portland, USA, 27-30 May 2008,

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Item Type:Conference Proceedings
Status:Published
Refereed:No
Glasgow Author(s) Enlighten ID:Strain, Dr Michael and Macintyre, Dr Douglas and De La Rue, Professor Richard and Samarelli, Mr Antonio and Thoms, Dr Stephen and Sorel, Professor Marc
Authors: Thoms, S., Gnan, M., Macintyre, D., Samarelli, A., Sorel, M., Strain, M., and De La Rue, R.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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