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Planar self-aligned microwave InGaP/GaAs HBTs using He+/O+ implant isolation

Khalid, A.H., Sotoodeh, M., and Rezazadeh, A.A. (1997) Planar self-aligned microwave InGaP/GaAs HBTs using He+/O+ implant isolation. In: Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications (EDMO), 24-25 Nov 1997, London, UK.

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Abstract

The fabrication results of InGaP/GaAs HBTs using a planar technology are presented. The device isolation was achieved by ion implantation using oxygen and hydrogen ions. However, this combination of ions produced a new problem related to carbon acceptor passivation inside the base layer of the HBT. To avoid this situation, hydrogen was replaced with heavier and thus less diffusive helium ions. Measured characteristics of the He+/O+ implanted HBTs show no variation of current gain with device geometry and suggest that the problem related to passivation of carbon accepters inside the base has completely been resolved. The fabricated InGaP/GaAs microwave HBTs show an almost uniform cut-off frequency, fT, of about 35 GHz for an emitter area of 8×10 μm2.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s):Khalid, Dr Ata-ul-Habib
Authors: Khalid, A.H., Sotoodeh, M., and Rezazadeh, A.A.
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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