Multilayer CPW lowpass filters on GaAs/Si MMICs

Abstract

A multilayer coplanar waveguide lowpass filter, fabricated on GaAs and Si substrates using MMIC technology, is presented and the performance investigated experimentally and with electromagnetic simulations. The filter is a Chebyshev type employing three low impedance sections and two high impedance sections. The low impedance sections have a characteristic impedance of 3 Ω. The high impedance lines use a narrow centre conductor mounted on top of the polyimide layers in order to achieve as high an impedance as possible (100 Ω).