Imprinted quarter wave plate at terahertz frequency

Saha, S., Ma, Y., Grant, J. , Khalid, A. and Cumming, D. (2010) Imprinted quarter wave plate at terahertz frequency. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 28(6), C6M83-C6M87. (doi:10.1116/1.3497023)

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Publisher's URL: http://dx.doi.org/10.1116/1.3497023

Abstract

The authors have imprinted high aspect ratio artificial dielectric quarter wave plates (QWPs) on polymers for use at 2.6, 3.2, and 3.8 THz. The QWPs are imprinted on high density polyethylene using silicon masters. The grating period for the quarter wave plates is 60 μm. Deep gratings of 330, 280, and 230 μm are used to obtain a π/2 phase retardance between TE and TM polarizations propagating through the QWPs. An inductively coupled plasma etch process was used to create the silicon masters for the imprint. A combination of heat and pressure was used for the imprinting process. Two plates, fixed in a back-to-back configuration, were used for each QWP. A highest aspect ratio (grating height/grating width) of 7 was obtained using the imprint technology.

Item Type:Articles
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Saha, Dr Shimul and Ma, Mr Yong and Khalid, Dr Ata-ul-Habib and Grant, Dr James and Cumming, Professor David
Authors: Saha, S., Ma, Y., Grant, J., Khalid, A., and Cumming, D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN:1071-1023
ISSN (Online):1520-8567

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