Near-simultaneous dual energy range EELS spectrum imaging

Scott, J. , Thomas, P.J., MacKenzie, M., McFadzean, S., Wilbrink, J., Craven, A.J. and Nicholson, W.A.P. (2008) Near-simultaneous dual energy range EELS spectrum imaging. Ultramicroscopy, 108(12), pp. 1586-1594. (doi: 10.1016/j.ultramic.2008.05.006)

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A system that allows the collection of the low loss spectrum and the core loss spectrum, covering different energy regions, at each pixel in a spectrum image is described. It makes use of a fast electrostatic shutter with control signals provided by the spectrum imaging software and synchronisation provided by the CCD camera controller. The system also allows simultaneous collection of the X-ray spectrum and the signals from the imaging detectors while allowing the use of the existing features of the spectrum imaging software including drift correction and sub-pixel scanning. The system allows acquisition of high-quality spectra from both the core and the low loss regions, allowing full processing of the EELS data. Examples are given to show the benefits, including deconvolution, absolute thickness mapping and determination of numbers of atoms per unit area and per unit volume. Possible further developments are considered.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Scott, Dr Jamie and Nicholson, Dr Patrick and MacKenzie, Dr Maureen and Craven, Professor Alan and McFadzean, Dr Sam
Authors: Scott, J., Thomas, P.J., MacKenzie, M., McFadzean, S., Wilbrink, J., Craven, A.J., and Nicholson, W.A.P.
Subjects:Q Science > QC Physics
College/School:College of Science and Engineering > School of Physics and Astronomy
Journal Name:Ultramicroscopy
Published Online:30 May 2008

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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
350671Chemistry, structure and bonding in high-k gate oxide stacksAlan CravenEngineering & Physical Sciences Research Council (EPSRC)GR/S44280/01Physics and Astronomy
358573Sub 100nm 111-V MOSFET's for Digital ApplicationsIain ThayneEngineering & Physical Sciences Research Council (EPSRC)GR/S61218/01Electronic and Nanoscale Engineering