Very high performance 50 nm T-gate III-V HEMTs enabled by robust nanofabrication technologies

Thayne, I., Cao, X., Moran, D.A.J., Boyd, E., Elgaid, K., McLelland, H., Holland, M., Thoms, S. and Stanley, C. (2004) Very high performance 50 nm T-gate III-V HEMTs enabled by robust nanofabrication technologies. In: 4th IEEE Conference on Nanotechnology 2004, Munich, Germany, 16-19 August 2004, pp. 95-97. ISBN 0780385365 (doi:10.1109/NANO.2004.1392261)

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Publisher's URL: http://dx.doi.org/10.1109/NANO.2004.1392261

Abstract

In this paper, we review a range of nanofabrication techniques which enable the realization of uniform, high yield, high performance 50 nm T-gate III-V high electron mobility transistors (HEMTs). These technologies have been applied in the fabrication of a range of lattice matched and pseudomorphic InP HEMTs and GaAs metamorphic HEMTs with functional yields in excess of 95%, threshold voltage uniformity of 5 mV, DC transconductance of up to 1600 mS/mm and f/sub T/ of up to 480 GHz. These technologies and device demonstrators are key to enabling a wide range of millimeter-wave imaging and sensing applications beyond 100 GHz, particularly where array-based multi-channel solutions are required.

Item Type:Conference Proceedings
Keywords:HEMT, HEMTS, high performance, high-performance, nanofabrication, performance, technology
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thayne, Professor Iain and Thoms, Dr Stephen and Stanley, Professor Colin and Moran, Dr David and Elgaid, Dr Khaled
Authors: Thayne, I., Cao, X., Moran, D.A.J., Boyd, E., Elgaid, K., McLelland, H., Holland, M., Thoms, S., and Stanley, C.
Subjects:T Technology > T Technology (General)
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Publisher:IEEE
ISBN:0780385365
Copyright Holders:Copyright © 2004 IEEE
First Published:First published in 4th IEEE Conference on Nanotechnology 2004
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher.

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