Batch process for the fabrication of LiNBO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

Ulliac, G., Courjal, N., Chong, H. M. H. and De La Rue, R. M. (2008) Batch process for the fabrication of LiNBO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optics Materials, 31(2), pp. 196-200. (doi:10.1016/j.optmat.2008.03.004)

Ulliac, G., Courjal, N., Chong, H. M. H. and De La Rue, R. M. (2008) Batch process for the fabrication of LiNBO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching. Optics Materials, 31(2), pp. 196-200. (doi:10.1016/j.optmat.2008.03.004)

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Publisher's URL: http://dx.doi.org/10.1016/j.optmat.2008.03.004


Item Type:Articles
Keywords:FABRICATION PHOTONIC CRYSTALS photonic crystal etching
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Chong, Dr Harold and De La Rue, Professor Richard
Authors: Ulliac, G., Courjal, N., Chong, H. M. H., and De La Rue, R. M.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Journal Name:Optics Materials
ISSN:0925-3467

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