High-resolution lithography

Macintyre, D.S. and Thoms, S. (2002) High-resolution lithography. In: McGeough, J.A. (ed.) Micromachining of Engineering Materials. Series: Mechanical engineering (139). Marcel Dekker: New York, USA, pp. 325-368. ISBN 9780824706449

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Item Type:Book Sections
Glasgow Author(s) Enlighten ID:Thoms, Dr Stephen and Macintyre, Dr Douglas
Authors: Macintyre, D.S., and Thoms, S.
Subjects:T Technology > TJ Mechanical engineering and machinery
T Technology > TK Electrical engineering. Electronics Nuclear engineering
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Publisher:Marcel Dekker

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