Thoms, S. and Macintyre, D.S. (2002) High resolution lithography. In: McGeough, J.A. (ed.) Micromachining of Engineering Materials. Series: Mechanical engineering (139). Marcel Deckker: New York, USA. ISBN 9780824706449
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| Item Type: | Book Sections |
|---|---|
| Status: | Published |
| Glasgow Author(s) Enlighten ID: | Thoms, Dr Stephen and Macintyre, Dr Douglas |
| Authors: | Thoms, S., and Macintyre, D.S. |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
| Publisher: | Marcel Deckker |
| ISBN: | 9780824706449 |
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