Elgaid, K., Zhou, H., Wilkinson, C. and Thayne, I. (2005) Room temperature deposited Si3N4 characterization and applications in MMICs. In: 8th International symposium on Silicon Nitride and Silicon dioxide thin insulating films and emerging dielectrics, Quebec, Canada,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Dielectrics, Films, Mmic, Room-Temperature, Silicon |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping and Thayne, Prof Iain and Wilkinson, Professor Christopher and Elgaid, Dr Khaled |
| Authors: | Elgaid, K., Zhou, H., Wilkinson, C., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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Deposit and Record Details
Deposit and Record Details