Low temperature high density highly uniform Si3N4 technology for passive and active devices in MMMIC applications

Elgaid, K., Zhou, H., Wilkinson, C. and Thayne, I. (2004) Low temperature high density highly uniform Si3N4 technology for passive and active devices in MMMIC applications. In: GaAs Mantech 2004, Tampa, USA,

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Item Type:Conference Proceedings
Keywords:Density, Device, Devices, GAAS, Passive, Technology, Uniform
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Zhou, Dr Haiping and Thayne, Professor Iain and Wilkinson, Professor Christopher and Elgaid, Dr Khaled
Authors: Elgaid, K., Zhou, H., Wilkinson, C., and Thayne, I.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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