Elgaid, K., Zhou, H., Wilkinson, C. and Thayne, I. (2004) Low temperature high density highly uniform Si3N4 technology for passive and active devices in MMMIC applications. In: GaAs Mantech 2004, Tampa, USA,
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| Item Type: | Conference Proceedings |
|---|---|
| Keywords: | Density, Device, Devices, GAAS, Passive, Technology, Uniform |
| Status: | Published |
| Refereed: | Yes |
| Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping and Thayne, Prof Iain and Wilkinson, Professor Christopher and Elgaid, Dr Khaled |
| Authors: | Elgaid, K., Zhou, H., Wilkinson, C., and Thayne, I. |
| College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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