Low temperature high density Si3N4 MIM capacitors technology for MMIC and RF-MEMs applications

Elgaid, K., Zhou, H., Wilkinson, C. and Thayne, I. (2003) Low temperature high density Si3N4 MIM capacitors technology for MMIC and RF-MEMs applications. In: Microelectronic and Nanoelectronic Engineering, Cambridge, UK,

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Item Type:Conference Proceedings
Keywords:Density, Engineering, Mmic, Technology
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Zhou, Dr Haiping and Thayne, Professor Iain and Wilkinson, Professor Christopher and Elgaid, Dr Khaled
Authors: Elgaid, K., Zhou, H., Wilkinson, C., and Thayne, I.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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