Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrate

Elgaid, K., McCloy, D. and Thayne, I. (2002) Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrate. In: Microelectronic and Nanoelectronic Engineering 2002, Lugano, Switzerland,

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Item Type:Conference Proceedings
Keywords:CMOS, Engineering, GAAS, Mmic, PHEMTS, Su8 Negative Resist, Substrate
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Thayne, Professor Iain and Elgaid, Dr Khaled
Authors: Elgaid, K., McCloy, D., and Thayne, I.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering

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