Li, X., Zhou, H., Hill, R., Wilkinson, C. and Thayne, I. (2006) Dry etching of a device quality high-k GaxGdyOz oxide in CH4/H2-O2 chemistry for the fabrication of III-V MOSFETs. In: 32nd International Conference on Micro-and Nano-Engineering 2006, Barcelona, Spain,
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Item Type: | Conference Proceedings |
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Keywords: | Chemistry, Device, Dry Etching, Fabrication, Gaxgdyoz, High-K, III-V MOSFET, III-V MOSFETS, MOSFET, MOSFETS, Oxide |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping and Thayne, Prof Iain and Li, Dr Xiang and Hill, Mr Richard and Wilkinson, Professor Christopher |
Authors: | Li, X., Zhou, H., Hill, R., Wilkinson, C., and Thayne, I. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
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