Li, X. , Hill, R., Zhou, H., Wilkinson, C.D.W., Holland, M. and Thayne, I.G. (2006) GaxGdyOz Dry Etching Processes for the Fabrication of III-V MOSFET. In: UK III-V Compound Semiconductors 2006, Sheffield, UK,
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Item Type: | Conference Proceedings |
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Keywords: | Cells, Compound Semiconductor, Damage, Dry Etching, Electron, Electron-Microscopy, Fabrication, GAAS, Gates, Gaxgdyoz, HEMT, III-V MOSFET, Intermediate Band, Losses, Low Damage, MOSFET, MOSFETS, Rie, Semiconductor, Semiconductors, Solar Cell, Spectroscopy, System, Systems, Techn |
Status: | Published |
Refereed: | Yes |
Glasgow Author(s) Enlighten ID: | Zhou, Dr Haiping and Thayne, Prof Iain and Hill, Mr Richard and Wilkinson, Professor Christopher and Li, Dr Xu |
Authors: | Li, X., Hill, R., Zhou, H., Wilkinson, C.D.W., Holland, M., and Thayne, I.G. |
College/School: | College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering |
Publisher: | IOP/EPSRC |
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