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Quantum mechanical enhancement of the random dopant induced threshold voltage fluctuations and lowering in sub 0.1 micron MOSFETs

Asenov, A., Slavcheva, G., Brown, A.R., Davies, J.H., and Saini, S. (1999) Quantum mechanical enhancement of the random dopant induced threshold voltage fluctuations and lowering in sub 0.1 micron MOSFETs. In: International Electron Devices Meeting, 5-8 December 1999, Washington, DC.

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Publisher's URL: http://dx.doi.org/10.1109/IEDM.1999.824210

Abstract

A detailed study of the influence of quantum effects in the inversion layer on the random dopant induced threshold voltage fluctuations and lowering in sub 0.1 micron MOSFETs has been performed. This has been achieved using a full 3D implementation of the density gradient (DG) formalism incorporated in our previously published 3D `atomistic' simulation approach. This results in a consistent, fully 3D, quantum mechanical picture which implies not only the vertical inversion layer quantisation but also the lateral confinement effects manifested by current filamentation in the `valleys' of the random potential fluctuations. We have shown that the net result of including quantum mechanical effect, while considering statistical fluctuations, is an increase in both threshold voltage fluctuations and lowering.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s):Asenov, Prof Asen and Davies, Prof John
Authors: Asenov, A., Slavcheva, G., Brown, A.R., Davies, J.H., and Saini, S.
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
Research Group:Device Modelling Group
Publisher:Institute of Electrical and Electronics Engineers
Copyright Holders:Copyright © 1999 Institute of Electrical and Electronics Engineers
First Published:First published in International Electron Devices Meeting (1999):535-538
Publisher Policy:Reproduced in accordance with the copyright policy of the publisher

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