A MEMS Gravimeter with Multi-Axis Gravitational Sensitivity

Middlemiss, R. P. et al. (2022) A MEMS Gravimeter with Multi-Axis Gravitational Sensitivity. In: 9th International Symposium on Inertial Sensors and Systems (INERTIAL 2022), Avignon, France, 8-11 May 2022, ISBN 9781665402828 (doi: 10.1109/INERTIAL53425.2022.9787754)

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A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability of this device was demonstrated by measuring the Earth tides. The success of this device was enabled in part by its extremely low resonant frequency. This low frequency was achieved with a geometric anti-spring design, fabricated using well-established photolithography and dry etch techniques. Analytical models can be used to calculate the results of these non-linear oscillating systems, but the power of finite element analysis has not been fully utilised to explore the parameter space before now. In this article finite element models are used to investigate the behaviour of geometric anti-springs. These computer models provide the ability to investigate the effect of the fabrication material of the device: anisotropic <100> crystalline silicon. This is a parameter that is difficult to investigate analytically, but finite element modelling is used to take anisotropy into account. The finite element models are then used to demonstrate the design of a three-axis gravimeter enabling the gravity tensor to be measured - a significantly more powerful tool than the original single-axis device.

Item Type:Conference Proceedings
Additional Information:This work was funded by the Royal Society Paul Instrument Fund (STFC grant number ST/M000427/1), and the UK National Quantum Technology Hub in Quantum Enhanced Imaging (EP/M01326X/1). Dr R. P. Middlemiss is supported by the Royal Academy of Engineering under the Research Fellowship scheme (Project RF/201819/18/83).
Glasgow Author(s) Enlighten ID:Rowan, Professor Sheila and Hammond, Professor Giles and Paul, Professor Douglas and Hough, Professor James and Campsie, Mr Paul and Belwanshi, Dr Vinod and Prasad, Dr Abhinav and Middlemiss, Dr Richard
Authors: Middlemiss, R. P., Campsie, P., Cunningham, W., Douglas, R., McIvor, V., Belwanshi, V., Hough, J., Rowan, S., Paul, D. J., Prasad, A., and Hammond, G. D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Published Online:08 June 2022
Copyright Holders:Copyright © 2022 IEEE
First Published:First published in 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Publisher Policy:Reproduced in accordance with the publisher copyright policy
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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
190789Monolithic Silicon Photonics Interferometer for Ultra-sensitive MEMS SensorsGiles HammondScience and Technology Facilities Council (STFC)ST/M000427/1P&S - Physics & Astronomy
190841UK Quantum Technology Hub in Enhanced Quantum ImagingMiles PadgettEngineering and Physical Sciences Research Council (EPSRC)EP/M01326X/1P&S - Physics & Astronomy
305114RAEng Fellowship Richard MiddlemissRichard MiddlemissRoyal Academy of Engineering (RAE)RF/201819/18/83ENG - Electronics & Nanoscale Engineering