A Simulation Study of the Temperature Sensitivity and Impact of Fabrication Tolerances on the Performance of a Geometric Anti-Spring Based MEMS Gravimeter

Belwanshi, V. , Prasad, A. , Toland, K. , Anastasiou, K., Bramsiepe, S. , Middlemiss, R. , Paul, D. J. and Hammond, G. D. (2022) A Simulation Study of the Temperature Sensitivity and Impact of Fabrication Tolerances on the Performance of a Geometric Anti-Spring Based MEMS Gravimeter. In: 9th International Symposium on Inertial Sensors and Systems (INERTIAL 2022), Avignon, France, 8-11 May 2022, ISBN 9781665402828 (doi: 10.1109/INERTIAL53425.2022.9787761)

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Abstract

In this work, the effect of temperature change and fabrication tolerances observed from fabricated devices for a geometric anti-spring (GAS) based Microelectromechanical Systems (MEMS) gravimeter is modelled using Finite Element Analysis (FEA). The temperature-induced effects are analysed in terms of the temperature coefficient of deflection (TCD) for GAS flexures of varying cross-section profiles. The simulated models suggest that the maximum TCD is observed at the minimum stiffness operating points of the flexures. The models also suggest that the cross-sectional shape changes due to fabrication tolerances significantly impact the stiffness, and, hence, the resonant frequency of the devices. Interestingly, it is observed that the temperature sensitivities of the simplified models are found to be mainly dependent on the device material (Si), irrespective of the cross-sectional profiles.

Item Type:Conference Proceedings
Additional Information:The authors would like to thank the following funders towards this project: Royal Society Paul Instrument Fund, STFC grant number ST/M000427/1, UK National Quantum Technology Hub (EP/M01326X/1, EP/T001046/1), EU H2020 project ‘NEWTON-g’ (H2020-FETOPEN-1-2016-2017) and the Royal Academy of Engineering grants CiET2021_123 and RF/201819/18/83.
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Bramsiepe, Mr Steven and Hammond, Professor Giles and Toland, Dr Karl and Paul, Professor Douglas and Belwanshi, Dr Vinod and Anastasiou, Mr Kristian and Middlemiss, Dr Richard and Prasad, Dr Abhinav
Authors: Belwanshi, V., Prasad, A., Toland, K., Anastasiou, K., Bramsiepe, S., Middlemiss, R., Paul, D. J., and Hammond, G. D.
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Research Centre:College of Science and Engineering > School of Physics and Astronomy > Institute for Gravitational Research
ISSN:2377-3480
ISBN:9781665402828
Published Online:08 June 2022
Copyright Holders:Copyright © 2022 IEEE
First Published:First published in 2022 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Publisher Policy:Reproduced in accordance with the publisher copyright policy
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Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
190789Monolithic Silicon Photonics Interferometer for Ultra-sensitive MEMS SensorsGiles HammondScience and Technology Facilities Council (STFC)ST/M000427/1P&S - Physics & Astronomy
190841UK Quantum Technology Hub in Enhanced Quantum ImagingMiles PadgettEngineering and Physical Sciences Research Council (EPSRC)EP/M01326X/1P&S - Physics & Astronomy
305673Quantum Hub 2 - Birmingham - UK Quantum Technology Hub for Sensors and TimingDouglas PaulEngineering and Physical Sciences Research Council (EPSRC)EP/T001046/1P&S - Physics & Astronomy
305114RAEng Fellowship Richard MiddlemissRichard MiddlemissRoyal Academy of Engineering (RAE)RF/201819/18/83ENG - Electronics & Nanoscale Engineering