TCAD Simulations of High-Aspect-Ratio Nano-biosensor for Label-Free Sensing Application

Dhar, R. P. S., Kumar, N. , Medina-Bailon, C., Garcia, C. P. and Georgiev, V. P. (2021) TCAD Simulations of High-Aspect-Ratio Nano-biosensor for Label-Free Sensing Application. In: 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS), Caen, France, 1-3 Sep 2021, ISBN 9781665437455 (doi: 10.1109/EuroSOI-ULIS53016.2021.9560701)

Abstract

In this paper, we are presenting simulations of junctionless ion-sensitive field-effect transistor (JL-ISFET) as a pH sensor. Our approach is based on a combination of analytical and numerical methods to reveal the impact of the device geometry and structure on its performance. To have a realistic representation of the fabricated device, further simulations are carried which portray the sensing of surface potential by introducing interface trap charges between the oxide layer and electrolyte. Here, we present our initial steps that belong to a more complex and physically more elaborate simulation framework, which will lead to a better device sensing and fabrication choices of more generic biosensors, in a transition from analytical models to numerical simulations to include effects such as surface roughness and defects in the oxide.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Dhar, Ms Rakshita Pritam and Medina Bailon, Miss Cristina and Kumar, Dr Naveen and Georgiev, Professor Vihar
• Authors: Dhar, R. P. S., Kumar, N., Medina-Bailon, C., Garcia, C. P., and Georgiev, V. P.
• College/School: College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
• ISSN: 2472-9132
• ISBN: 9781665437455
• Copyright Holders: Copyright © 2021 IEEE
• First Published: First published in 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)
• Publisher Policy: Reproduced in accordance with the publisher copyright policy

Project Code	Award No	Project Name	Principal Investigator	Funder's Name	Funder Ref	Lead Dept
305900		Electrochemically-enabled high-throughput peptidomics for next-generation precision medicine	Vihar Georgiev	European Commission (EC)	862539	ENG - Electronics & Nanoscale Engineering