A MEMS gravimeter with multi-axis gravitational sensitivity

Middlemiss, R. P. , Campsie, P., Cunningham, W. , Douglas, R., McIvor, V., Hough, J. , Rowan, S. , Paul, D. J. , Prasad, A. and Hammond, G. D. (2021) A MEMS gravimeter with multi-axis gravitational sensitivity. arXiv, (Unpublished)

[img] Text
236579.pdf - Submitted Version
Available under License Creative Commons Attribution.


Publisher's URL: https://arxiv.org/abs/2102.05528


A single-axis Microelectromechanical system gravimeter has recently been developed at the University of Glasgow. The sensitivity and stability of this device was demonstrated by measuring the Earth tides. The success of this device was enabled in part by its extremely low resonant frequency. This low frequency was achieved with a geometric anti-spring design, fabricated using well-established photolithography and dry etch techniques. Analytical models can be used to calculate the results of these non-linear oscillating systems, but the power of finite element analysis has not been fully utilised to explore the parameter space before now. In this article, the results of previous analytical solutions are replicated using finite element models, before applying the same techniques to optimise the design of the gravimeter. These computer models provide the ability to investigate the effect of the fabrication material of the device: anisotropic <100> crystalline silicon. This is a parameter that is difficult to investigate analytically, but finite element modelling is demonstrated here to provide accurate predictions of real gravimeter behaviour by taking anisotropy into account. The finite element models are then used to demonstrate the design of a three-axis gravimeter enabling the gravity tensor to be measured - a significantly more powerful surveying tool than the original single-axis device.

Item Type:Articles
Glasgow Author(s) Enlighten ID:Hammond, Professor Giles and Middlemiss, Dr Richard and Prasad, Dr Abhinav and Rowan, Professor Sheila and Cunningham, Dr Liam and Paul, Professor Douglas and Hough, Professor James and Campsie, Mr Paul and DOUGLAS, Rebecca
Authors: Middlemiss, R. P., Campsie, P., Cunningham, W., Douglas, R., McIvor, V., Hough, J., Rowan, S., Paul, D. J., Prasad, A., and Hammond, G. D.
Subjects:Q Science > QC Physics
College/School:College of Science and Engineering > School of Engineering > Electronics and Nanoscale Engineering
College of Science and Engineering > School of Physics and Astronomy
Journal Name:arXiv
Copyright Holders:Copyright © 2021 The Authors
Publisher Policy:Reproduced under a Creative Commons License

University Staff: Request a correction | Enlighten Editors: Update this record

Project CodeAward NoProject NamePrincipal InvestigatorFunder's NameFunder RefLead Dept
190841UK Quantum Technology Hub in Enhanced Quantum ImagingMiles PadgettEngineering and Physical Sciences Research Council (EPSRC)EP/M01326X/1P&S - Physics & Astronomy
305114RAEng Fellowship Richard MiddlemissRichard MiddlemissRoyal Academy of Engineering (RAE)RF/201819/18/83ENG - Electronics & Nanoscale Engineering
190789Monolithic Silicon Photonics Interferometer for Ultra-sensitive MEMS SensorsGiles HammondScience and Technology Facilities Council (STFC)ST/M000427/1P&S - Physics & Astronomy