A MEMS Microphone Inspired by Ormia for Spatial Sound Detection

Zhang, Y., Bauer, R., Whitmer, W. M. , Jackson, J. C., Windmill, J. F.C. and Uttamchandani, D. (2018) A MEMS Microphone Inspired by Ormia for Spatial Sound Detection. In: 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK, 21-25 Jan 2018, pp. 253-256. ISBN 9781538647820 (doi: 10.1109/MEMSYS.2018.8346532)

Abstract

This work introduces a MEMS microphone with two pairs of orthogonal and joined sensor membranes, with independent acoustic directionality responses, leading to a 3D sound localization potential. This single microphone can thus be regarded as two individual bi-directional microphones. Combining this architecture with the fly Ormia ochracea's tympana mechanism, this microphone is also the first biomimetic MEMS microphone with piezoelectric sensing, designed for 2D sound localization.

• Item Type: Conference Proceedings
• Additional Information: This work was supported by the EPSRC under grant EP/M026701/1 and by the European Research Council under the European Union’s Seventh Framework Programme (FP/2007-2013) / ERC Grant Agreement n. [615030].
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Windmill, Professor James and Jackson, Mr Joseph and Whitmer, Dr William
• Authors: Zhang, Y., Bauer, R., Whitmer, W. M., Jackson, J. C., Windmill, J. F.C., and Uttamchandani, D.
• College/School: College of Medical Veterinary and Life Sciences; College of Science and Engineering > School of Engineering
• ISSN: 2160-1968
• ISBN: 9781538647820
• Copyright Holders: Copyright © 2018 IEEE
• First Published: First published in 2018 IEEE Micro Electro Mechanical Systems (MEMS): 253-256
• Publisher Policy: Reproduced in accordance with the publisher copyright policy