High-frequency Piezoelectric-on-Si MEMS Resonator and Numerical Method for Parameter Extraction

Erbes, A., Prasad, A. and Seshia, A. A. (2015) High-frequency Piezoelectric-on-Si MEMS Resonator and Numerical Method for Parameter Extraction. In: 2014 European Frequency and Time Forum (EFTF), Neuchatel, Switzerland, 23-26 Jun 2014, pp. 305-307. ISBN 9781479952526 (doi:10.1109/EFTF.2014.7331493)

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Abstract

This paper presents the design and characterization of a piezoelectrically-transduced (AlN) on silicon micro-mechanical resonator operating in its lateral bulk acoustic width-extensional mode at 28.73 MHz. The equivalent m-BVD model of the resonator is extracted using a least-squares-error algorithm which is presented in this paper. We report a mechanical Q factor of 5970 and motional resistance Rx of 273 Ω in vacuum (p0 = 30 mTorr) for the fundamental bulk acoustic mode for a 240 μm × 149 μm resonator. A good fit between the m-BVD model and the experimental data is obtained using the numerical fitting algorithm.

Item Type:Conference Proceedings
Status:Published
Refereed:Yes
Glasgow Author(s) Enlighten ID:Prasad, Dr Abhinav
Authors: Erbes, A., Prasad, A., and Seshia, A. A.
College/School:College of Science and Engineering > School of Physics and Astronomy
ISBN:9781479952526
Published Online:19 November 2015

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