Micromechanical Piezoelectric-on-silicon BAW Resonators for Sensing in Liquid Environments

Prasad, A. , Seshia, A. A. and Charmet, J. (2015) Micromechanical Piezoelectric-on-silicon BAW Resonators for Sensing in Liquid Environments. In: 2015 Joint Conference of the IEEE International Frequency Control Symposium and the European Frequency and Time Forum, Denver, CO, USA, 12-16 Apr 2015, ISBN 9781479988662 (doi: 10.1109/FCS.2015.7138825)

Abstract

This paper reports micromachined piezoelectric-on-silicon bulk acoustic wave resonators operating at a nominal frequency of approximately 3.15 MHz in fluidic media. Electrical measurements of the open-loop response of the resonators when one of the resonator surfaces is submerged in water indicate high quality factors in the range of 110-190. These values of quality factor are at least an order of magnitude higher than the flexural mode counterparts. The resonators are further exposed to Glycerol-Water mixtures of varying viscosity-density resulting in characteristic negative resonant frequency shifts. Experimental values are compared with a simplified liquid loading model and an agreement of up to 13% for highest and within 3-4% for lowest glycerol concentrations is established. These devices due to the relative ease of operation in liquid environments, scalability, high quality-factors and high mass-sensitivity have the potential for integration with microfluidics and electronics in order to realize an integrated platform for biochemical sensing and analysis.

• Item Type: Conference Proceedings
• Status: Published
• Refereed: Yes
• Glasgow Author(s) Enlighten ID: Prasad, Dr Abhinav
• Authors: Prasad, A., Seshia, A. A., and Charmet, J.
• College/School: College of Science and Engineering > School of Physics and Astronomy
• ISSN: 2327-1914
• ISBN: 9781479988662
• Published Online: 02 July 2015